KY-R-LQC400-6M CVD furnace

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time：2023/8/22 10:09:40

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The KY-R-LQC400-6M CVD furnace is a special high vacuum CVD system, which is an ideal equipment for universities, research institutes, and industrial and mining enterprises to conduct high-temperature atmosphere sintering, atmosphere reduction, CVD experiments, and vacuum annealing. The equipment adopts a double-layer shell structure with partial cooling, so that the surface temperature of the shell is less than 55 ° C. The use of high-purity alumina polycrystalline fibers as insulation materials can be environmentally friendly, energy-saving, and reduce heat loss. Simultaneously adopting a lightweight furnace, it has high thermal efficiency, low energy consumption, and good temperature uniformity inside the furnace, which can extend the efficiency of equipment use

KY-R-LQC400-6M CVD Furnace Product Features

The furnace has excellent sealing performance and can be filled with mixed gases such as nitrogen, acetylene, methane, acetone, etc

Combined feeding method, precise control of feeding amount

Configure electronic flow meters and peristaltic pumps; Automatic control of temperature, pressure, and flow inside the furnace

Lightweight furnace, high thermal efficiency, low energy consumption, and good temperature uniformity inside the furnace

The PLC fully automatically controls the entire process, and the operation is simple and intuitive through the touch screen

Stable operation, suitable for maintenance, and equipment size can be customized according to non-standard requirements

Technical parameters of KY-R-LQC series continuous CVD furnace

上一个：CVD vapor deposition furnace

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