The CVD vapor deposition furnace is a vertical vacuum induction heating furnace, which consists of the furnace body, furnace cover, vacuum system, electrical system, gas filling system, and water cooling system. The furnace body adopts a water-cooled interlayer structure. The furnace is equipped with an induction coil, and the heating element is also made of graphite material into a graphite crucible. The periphery of the heating element is an insulation device composed of carbon felt and an insulation device composed of corundum. The temperature measuring element adopts thermocouples, semi-automatic/manual control of furnace temperature, and intelligent temperature gauges are used for temperature control
Technical features of CVD vapor deposition furnace:
The working area size of CVD vapor deposition furnace can reach 2.5m × 2m × 4.5m, able to meet the needs of chemical vapor deposition treatment for large workpieces
The CVD vapor deposition furnace adopts independent temperature control in multiple temperature zones, with good temperature uniformity The CVD vapor deposition furnace adopts a special structure deposition chamber, which has good sealing effect and strong anti pollution ability The CVD vapor deposition furnace adopts a multi-channel deposition gas path, with a uniform flow field and no deposition dead corners, resulting in good deposition effect The CVD vapor deposition furnace can effectively handle various specifications of impurities generated during the production process
