Vapor deposition furnace is a product of the development and progress of the times. Vapor deposition furnace is a technology that uses various energy sources such as heating, plasma excitation, or light radiation through chemical reactions to form solid deposits at the gas or gas-solid interface of gaseous or vapor state chemicals in the reactor. Simply put, two or more gaseous raw materials are introduced into a reaction chamber, and then We undergo chemical reactions with each other to form a new material that is deposited on the surface of the substrate. Compared to PVD, the deposition process involves chemical reactions and is a meteorological chemical growth process
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